Separable water supply machine for hydraulic-driven micro device

Yudai Fujiwara, Tohru Sasaki, Masao Hebisawa, Shohei Hanaoka, Kenji Terabayashi, Mitsuru Jindai, Kuniaki Dohda, Satoshi Kuroda

研究成果: 書籍の章/レポート/会議録会議への寄与査読

抄録

A hydraulically driven microdevice that we developed has both high-precision sensing and high-resolution positioning. A water-supply machine supplies and extracts water to and from the hydraulically driven microdevice, an end effector, for micromanipulation. Controlled by the water-supply machine, the hydraulically driven microdevice handles objects and measures the amount of force acting on the end effector by measuring changes in pressure. Our previous device can measure small forces acting on the end effector. However, it is difficult to position the device when the gain in the measured force is high because the end effector moves a large amount in response to a small amount of liquid supplied, and the positioning resolution decreases. This makes the device unsuitable for micro-manipulation. High-precision sensing and high-resolution positioning have a trade-off relationship. To solve this problem, we propose a new machine called a separated water-supply machine. The part that supplies water and the part that measures pressure are separated through a flow channel. Each part is its own cylinder. The cross section of the part that supplies water is large; the cross section of the part that measures pressure is small. This enables the machine to supply water to the hydraulically driven microdevice with precision while also being highly sensitive to gain in measured force. This report describes the separated water-supply machine that we developed and the results of our evaluation of its sensing precision and positioning resolution.

本文言語英語
ホスト出版物のタイトルEuropean Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018
編集者O. Riemer, Enrico Savio, D. Billington, R. K. Leach, D. Phillips
出版社euspen
ページ225-226
ページ数2
ISBN(印刷版)9780995775121
出版ステータス出版済み - 2018
イベント18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018 - Venice, イタリア
継続期間: 2018/06/042018/06/08

出版物シリーズ

名前European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018

学会

学会18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018
国/地域イタリア
CityVenice
Period2018/06/042018/06/08

ASJC Scopus 主題領域

  • 産業および生産工学
  • 器械工学
  • 環境工学
  • 機械工学
  • 材料科学一般

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