Motion switching control using the invariant set for the silicon wafer transfer robot

Koichi Abiko; Kenji Hirata; Yoshito Ohta

doi:10.1299/kikaic.77.1017

Motion switching control using the invariant set for the silicon wafer transfer robot

Koichi Abiko^*, Kenji Hirata, Yoshito Ohta

^*この論文の責任著者

工学科　電気電子工学コース

研究成果: ジャーナルへの寄稿 › 学術論文 › 査読

1 被引用数 (Scopus)

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This paper considers control design problems that can reduce a throughput time of total task of a robotic manipulator which is used in handling silicon semiconductor wafers. We propose an algorithm for discontinuous switchings between translatory and rotational motions. We derive the motion switching algorithm by utilizing an invariant set of the rotational dynamics. The effectiveness of the proposed algorithm is evaluated though experimental studies.

本文言語	英語
ページ（範囲）	1017-1028
ページ数	12
ジャーナル	Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
巻	77
号	775
DOI	https://doi.org/10.1299/kikaic.77.1017
出版ステータス	出版済み - 2011

ASJC Scopus 主題領域

材料力学
機械工学
産業および生産工学

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10.1299/kikaic.77.1017

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title = "Motion switching control using the invariant set for the silicon wafer transfer robot",

abstract = "This paper considers control design problems that can reduce a throughput time of total task of a robotic manipulator which is used in handling silicon semiconductor wafers. We propose an algorithm for discontinuous switchings between translatory and rotational motions. We derive the motion switching algorithm by utilizing an invariant set of the rotational dynamics. The effectiveness of the proposed algorithm is evaluated though experimental studies.",

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AU - Hirata, Kenji

AU - Ohta, Yoshito

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N2 - This paper considers control design problems that can reduce a throughput time of total task of a robotic manipulator which is used in handling silicon semiconductor wafers. We propose an algorithm for discontinuous switchings between translatory and rotational motions. We derive the motion switching algorithm by utilizing an invariant set of the rotational dynamics. The effectiveness of the proposed algorithm is evaluated though experimental studies.

AB - This paper considers control design problems that can reduce a throughput time of total task of a robotic manipulator which is used in handling silicon semiconductor wafers. We propose an algorithm for discontinuous switchings between translatory and rotational motions. We derive the motion switching algorithm by utilizing an invariant set of the rotational dynamics. The effectiveness of the proposed algorithm is evaluated though experimental studies.

KW - Invariant Set

KW - Manipulator

KW - Motion Control

KW - Motion Switching Algorithm

KW - Optimal Control

KW - Silicon Wafer Transfer Robot

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M3 - 学術論文

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JO - Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C

JF - Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C

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ER -

Motion switching control using the invariant set for the silicon wafer transfer robot

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