Fabrication of CeO2/Al multilayer thin films and the thermal behavior

Shumpei Kurokawa; Takashi Hashizume; Masateru Nose; Atsushi Saiki

doi:10.1002/9781118771327.ch4

Fabrication of CeO₂/Al multilayer thin films and the thermal behavior

Shumpei Kurokawa, Takashi Hashizume, Masateru Nose, Atsushi Saiki

材料デザイン工学科

研究成果: 書籍の章/レポート/会議録 › 章 › 査読

抄録

Cerium dioxide (CeO₂) thin film is an attractive material with multiple applications, such as electrolytes in solid oxide fuel cells. In this study, CeO₂ and Al multilayer thin film were fabricated by using the differential pumping co-sputtering system which had multi-chamber and each layer was deposited in divided atmospheres and depositing condition independently. Their morphologies and the effect of annealing were investigated. As a result, as-deposited samples showed a peak of XRD at 2 θ = 38.5° corresponding to the (111) plane of Al. However annealed samples did not show the peaks of Al.

本文言語	英語
ホスト出版物のタイトル	Ceramics for Environmental and Energy Applications II - A Collection of Papers Presented at the 10th Pacific Rim Conference on Ceramic and Glass Technology, PacRim 2013
出版社	wiley
ページ	33-41
ページ数	9
ISBN（電子版）	9781118771327
ISBN（印刷版）	9781118771242
DOI	https://doi.org/10.1002/9781118771327.ch4
出版ステータス	出版済み - 2014/03/03
イベント	10th Pacific Rim Conference on Ceramic and Glass Technology, PacRim 2013 - Coronado, CA, 米国継続期間: 2013/06/02 → 2013/06/06

出版物シリーズ

名前	Ceramic Transactions
巻	246
ISSN（印刷版）	1042-1122

学会

学会	10th Pacific Rim Conference on Ceramic and Glass Technology, PacRim 2013
国/地域	米国
City	Coronado, CA
Period	2013/06/02 → 2013/06/06

ASJC Scopus 主題領域

工学一般
材料科学一般
エネルギー一般
化学工学一般

文献へのアクセス

10.1002/9781118771327.ch4

引用スタイル

Kurokawa, S., Hashizume, T., Nose, M., & Saiki, A. (2014). Fabrication of CeO₂/Al multilayer thin films and the thermal behavior. In Ceramics for Environmental and Energy Applications II - A Collection of Papers Presented at the 10th Pacific Rim Conference on Ceramic and Glass Technology, PacRim 2013 (pp. 33-41). (Ceramic Transactions; Vol. 246). wiley. https://doi.org/10.1002/9781118771327.ch4

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abstract = "Cerium dioxide (CeO2) thin film is an attractive material with multiple applications, such as electrolytes in solid oxide fuel cells. In this study, CeO2 and Al multilayer thin film were fabricated by using the differential pumping co-sputtering system which had multi-chamber and each layer was deposited in divided atmospheres and depositing condition independently. Their morphologies and the effect of annealing were investigated. As a result, as-deposited samples showed a peak of XRD at 2 θ = 38.5° corresponding to the (111) plane of Al. However annealed samples did not show the peaks of Al.",

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Kurokawa, S, Hashizume, T, Nose, M & Saiki, A 2014, Fabrication of CeO₂/Al multilayer thin films and the thermal behavior. in Ceramics for Environmental and Energy Applications II - A Collection of Papers Presented at the 10th Pacific Rim Conference on Ceramic and Glass Technology, PacRim 2013. Ceramic Transactions, vol. 246, wiley, pp. 33-41, 10th Pacific Rim Conference on Ceramic and Glass Technology, PacRim 2013, Coronado, CA, 米国, 2013/06/02. https://doi.org/10.1002/9781118771327.ch4

Fabrication of CeO₂/Al multilayer thin films and the thermal behavior. / Kurokawa, Shumpei; Hashizume, Takashi; Nose, Masateru その他.
Ceramics for Environmental and Energy Applications II - A Collection of Papers Presented at the 10th Pacific Rim Conference on Ceramic and Glass Technology, PacRim 2013. wiley, 2014. p. 33-41 (Ceramic Transactions; Vol. 246).

研究成果: 書籍の章/レポート/会議録 › 章 › 査読

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AU - Nose, Masateru

AU - Saiki, Atsushi

PY - 2014/3/3

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AB - Cerium dioxide (CeO2) thin film is an attractive material with multiple applications, such as electrolytes in solid oxide fuel cells. In this study, CeO2 and Al multilayer thin film were fabricated by using the differential pumping co-sputtering system which had multi-chamber and each layer was deposited in divided atmospheres and depositing condition independently. Their morphologies and the effect of annealing were investigated. As a result, as-deposited samples showed a peak of XRD at 2 θ = 38.5° corresponding to the (111) plane of Al. However annealed samples did not show the peaks of Al.

KW - Cerium dioxide

KW - Co-sputtering system

KW - Thin films

KW - X-ray diffraction spectrometry

KW - Yittria stabilized zirconia

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