Experimental evalutions of control of 2-axes wafer transfer robots for vacuum environment with input and horizontal oscillation constraints

This paper considers the positioning control of wafer transfer robots. In order to improve the productivity of semiconductors, the control system for wafer transfer robots is required to achieve high-speed transfer and highly accurate positioning. However, it is not easy to achieve such performance since the robots have non-linear properties. In this paper, we consider the positioning control of the robots by switching controllers which are designed using Loop Shaping Design Procedure. We evaluate the effectiveness of this proposed method through experiments.