抄録
This paper considers the positioning control of wafer transfer robots. In order to improve the productivity of semiconductors, the control system for wafer transfer robots is required to achieve high-speed transfer and highly accurate positioning. However, it is not easy to achieve such performance since the robots have non-linear properties. In this paper, we consider the positioning control of the robots by switching controllers which are designed using Loop Shaping Design Procedure. We evaluate the effectiveness of this proposed method through experiments.
本文言語 | 英語 |
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ページ(範囲) | 1184-1193 |
ページ数 | 10 |
ジャーナル | Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C |
巻 | 72 |
号 | 4 |
DOI | |
出版ステータス | 出版済み - 2006 |
ASJC Scopus 主題領域
- 材料力学
- 機械工学
- 産業および生産工学