Effects of deposition temperature on structural defect and electrical resistivity in heteroepitaxial La0.5Sr0.5CoO3/CeO2/YSZ/Si films

Chun Hua Chen; Atsushi Saiki; Naoki Wakiya; Kazuo Shinozaki; Nobuyasu Mizutani

doi:10.1116/1.1502695

Effects of deposition temperature on structural defect and electrical resistivity in heteroepitaxial La_0.5Sr_0.5CoO₃/CeO₂/YSZ/Si films

Chun Hua Chen, Atsushi Saiki, Naoki Wakiya, Kazuo Shinozaki, Nobuyasu Mizutani

材料デザイン工学科

研究成果: ジャーナルへの寄稿 › 学術論文 › 査読

4 被引用数 (Scopus)

抄録

The effects of deposition temperature on structural defect and electrical resistivity in heteroepitaxial La_0.5Sr_0.5CoO₃(LSCO)/CeO₂/YSZ/Si films were discussed. It was found that a high correlation existed between the electrical resistivity of LSCO and the defect type and concentration. The analysis showed that the distribution of electrical resistivity exihibited a mosaic dispersion degree dependence in 500-600 °C.

本文言語	英語
ページ（範囲）	1749-1754
ページ数	6
ジャーナル	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
巻	20
号	5
DOI	https://doi.org/10.1116/1.1502695
出版ステータス	出版済み - 2002

ASJC Scopus 主題領域

凝縮系物理学
表面および界面
表面、皮膜および薄膜

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10.1116/1.1502695

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引用スタイル

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abstract = "The effects of deposition temperature on structural defect and electrical resistivity in heteroepitaxial La0.5Sr0.5CoO3(LSCO)/CeO2/YSZ/Si films were discussed. It was found that a high correlation existed between the electrical resistivity of LSCO and the defect type and concentration. The analysis showed that the distribution of electrical resistivity exihibited a mosaic dispersion degree dependence in 500-600 °C.",

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Effects of deposition temperature on structural defect and electrical resistivity in heteroepitaxial La_0.5Sr_0.5CoO₃/CeO₂/YSZ/Si films. / Chen, Chun Hua; Saiki, Atsushi; Wakiya, Naoki その他.
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 20, No. 5, 2002, p. 1749-1754.

研究成果: ジャーナルへの寄稿 › 学術論文 › 査読

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AU - Saiki, Atsushi

AU - Wakiya, Naoki

AU - Shinozaki, Kazuo

AU - Mizutani, Nobuyasu

PY - 2002

Y1 - 2002

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AB - The effects of deposition temperature on structural defect and electrical resistivity in heteroepitaxial La0.5Sr0.5CoO3(LSCO)/CeO2/YSZ/Si films were discussed. It was found that a high correlation existed between the electrical resistivity of LSCO and the defect type and concentration. The analysis showed that the distribution of electrical resistivity exihibited a mosaic dispersion degree dependence in 500-600 °C.

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