差動排気同時成膜技術の確立による次世代型ナノコンポジット膜の創製

Keyphrases

1. Differential Pump 100%
2. Co-deposition 100%
3. Nanocomposite Film 100%
4. Deposition Methods 100%
5. Co-sputtering 75%
6. Sputtering System 75%
7. AlCrN 75%
8. Aluminum Oxide 50%
9. Aluminum Oxidation 25%
10. Functional Film 25%
11. Annealing in Air 25%
12. Nanocomosites 25%
13. Hard Coating 25%
14. Nitrides 25%
15. Al Film 25%
16. H-BN Films 25%
17. Thermodynamic Constraints 25%
18. Multifunctional Nanocomposite Film 25%
19. Silica 25%
20. Oxides 25%
21. Sputter Deposition 25%

Material Science

1. Nanocomposite Film 100%
2. Film 100%
3. Nitride Compound 25%
4. Hard Coating 25%
5. Aluminum Oxide 25%
6. Aluminum Nitride 25%
7. Oxide Compound 25%
8. Aluminum 25%