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差動排気同時成膜技術の確立による次世代型ナノコンポジット膜の創製
Nose, Masateru
(PI)
Ikeno, Susumu
(CoI)
Terayama, Kiyoshi
(CoI)
Matsuda, Kenji
(CoI)
Saiki, Atsushi
(CoPI)
材料デザイン工学科
概要
フィンガープリント
研究成果
(37)
フィンガープリント
このプロジェクトで扱った研究トピックを検索します。これらのラベルは、プロジェクトの研究費/助成金に基づいて生成されます。これらがまとまってユニークなフィンガープリントを構成します。
並べ替え順
重み付け
アルファベット順
Keyphrases
AlCrN
100%
Co-sputtering
70%
Oxidation Resistance
59%
Nanocomposite Coating
59%
Mechanical Properties
59%
Differential Pump
44%
Nanocomposite Film
44%
Sputtering System
40%
Annealing
37%
BN Coating
34%
Microstructure Properties
29%
RF Co-sputtering
29%
Self-hardening
29%
Two-chamber
29%
Cross-contamination
29%
Conductance
29%
Orifice
29%
Gas Monitor
29%
Optical Emission
29%
Glow Discharge Plasma
29%
Potential Difference
29%
Gas Flow
29%
Process Gases
29%
Spectroscope
29%
Novel Nanocomposite
29%
Functional Film
22%
Thermodynamic Constraints
18%
Co-deposition
14%
Deposition Methods
14%
CrAlN Coating
14%
Substrate Holder
14%
Molecular Flow
14%
System Development
14%
Flow Indicators
14%
Rapid Rotation
14%
Oxygen Contamination
14%
Oxygen Partial Pressure
14%
Co-deposits
14%
Multi-chamber
14%
SiOx
14%
Knudsen number
14%
Flow Parameters
14%
System Features
14%
Left Chambers
14%
Differential Pumping System
14%
Gasses
14%
BN Phase
14%
BN Interphase
14%
Hardness Values
12%
Hardness Value
12%
Plastic Hardness
11%
Reactive Co-sputtering
11%
CrAl
11%
DC Sputtering
11%
RF Sputtering
11%
As-deposited
11%
Indentation Hardness
11%
High Hardness
8%
Ultra-high
8%
Phase Ratio
7%
Aluminum Oxide
7%
Oxide Layer
7%
Vol%
7%
Hexagonal Boron Nitride (h-BN)
5%
Hexagonal Boron Nitride (h-BN)
5%
Material Science
Oxidation Resistance
59%
Nanocomposite Coating
59%
Nanocomposite Film
44%
Selected Area Diffraction
39%
Young's Modulus
39%
X-Ray Diffraction
39%
Composite Coating
29%
High-Resolution Transmission Electron Microscopy
29%
Boride
29%
Nanocomposite
29%
Mechanical Property
29%
Oxide Compound
23%
Gas Flow
19%
Surface (Surface Science)
14%
Indentation
14%
Film
14%
Alloy
14%
Aluminum Nitride
13%
Nanocrystalline
9%
X-Ray Photoelectron Spectroscopy
9%
Volume Fraction
9%
Emission Spectroscopy
9%
Silicon Wafer
9%
Transmission Electron Microscopy
9%
High Speed Steel
9%
Protective Atmosphere
9%
Engineering
Nanocomposite
66%
Oxidation Resistance
29%
Glow Discharge
21%
Light Emission
21%
Process Gas
19%
Potential Difference
19%
Gas Flow
19%
Spectrometer
19%
Super High
14%
Hardness Value
14%
Young's Modulus
12%
Phase Ratio
12%
Indentation Hardness
11%
Fine Grain
9%
Molecular Flow
9%
Knudsen Number
9%
Pumping System
9%
Oxygen Partial Pressure
9%
Thermodynamics
9%
Composite Coating
7%
Gaseous Mixture
7%