TY - GEN
T1 - Surface morphology of YSZ thin films deposited from a precursor solution under the electrical fields
AU - Saiki, Atsushi
AU - Hamada, Kento
AU - Hashizume, Takashi
PY - 2014
Y1 - 2014
N2 - In this study, surface morphology control and patterning has been carried out during deposition of thin films from a precursor solution by applying electrochemical method and electrical filed at the same time. The precursor was an aqueous solution of zirconyl nitrate, Y(NO3)3 -6H 2O, and NH3(aq). The thin film was deposited on the glass substrate of the minus electrode side. By applying the electrical field of 2.3-3.0 V, the Zr(Y)(OH)4 thin film was effectively deposited on glass substrates at room temperature. The as-deposited film was amorphous, and a crystalline phase of YSZ can be obtained after annealing at 723 K for 6 h in air. In order to establish morphology control and patterning, another pulse bias was applied to the electrical field along the perpendicular direction from the film deposition direction. The pulse type, frequency, amplitude, duty ratio were changed and the effect to the surface morphology was investigated. At only in limited condition, the striped patterns of YSZ films due to the frequency of the applied pulsed electrical field were observed.
AB - In this study, surface morphology control and patterning has been carried out during deposition of thin films from a precursor solution by applying electrochemical method and electrical filed at the same time. The precursor was an aqueous solution of zirconyl nitrate, Y(NO3)3 -6H 2O, and NH3(aq). The thin film was deposited on the glass substrate of the minus electrode side. By applying the electrical field of 2.3-3.0 V, the Zr(Y)(OH)4 thin film was effectively deposited on glass substrates at room temperature. The as-deposited film was amorphous, and a crystalline phase of YSZ can be obtained after annealing at 723 K for 6 h in air. In order to establish morphology control and patterning, another pulse bias was applied to the electrical field along the perpendicular direction from the film deposition direction. The pulse type, frequency, amplitude, duty ratio were changed and the effect to the surface morphology was investigated. At only in limited condition, the striped patterns of YSZ films due to the frequency of the applied pulsed electrical field were observed.
UR - http://www.scopus.com/inward/record.url?scp=84897949196&partnerID=8YFLogxK
U2 - 10.1002/9781118771464.ch20
DO - 10.1002/9781118771464.ch20
M3 - 会議への寄与
AN - SCOPUS:84897949196
SN - 9781118771501
T3 - Ceramic Transactions
SP - 193
EP - 199
BT - Innovative Processing and Manufacturing of Advanced Ceramics and Composites II - A Collection of Papers Presented at the 10th Pacific Rim Conference on Ceramic and Glass Technology, PacRim 2013
PB - American Ceramic Society
T2 - 10th Pacific Rim Conference on Ceramic and Glass Technology, PacRim 2013
Y2 - 2 June 2013 through 6 June 2013
ER -