Reciprocal space map measurement of ceramics thin films for unequal lattice change at high temperature

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Ceria and zirconia are very important for their thermal, mechanical, and chemical stability, and their thin films have attracted much attention for applications such as buffer layers for growing electric devices, thermal-shield or optical coatings, corrosion-resistant coatings, oxygen sensors and ionic conductors for fuel cells. To investigate and control the thin film orientation and phase is important to improve those performances. In this study, the reciprocal space maps of CeO2/YSZ/Si(001) were obtained at high temperature by adding a heater to the sample stage. CeO2 and YSZ thin films were epitaxially grown samples. By measuring lattice constants at high temperature, it was conducted that axes of CeO2 and YSZ thin films parallel to the substrate surface showed smaller thermal coefficients than bulk reference and axes perpendicular to the surface showed larger thermal coefficients due to the underlayer and Si substrate. The distortion rate of the lattice of each film was small around at the film deposition temperature. And it could be controled the lattice parameter at the film surface by the film thickness. Therefore, when another thin film, for example, SrTiO3 is deposited on the CeO2 layer, the lattice change of CeO2 with increasing temperature may differ from that before depositing the top layer.

Original languageEnglish
Title of host publicationPhysical Properties and Application of Advanced Materials
EditorsKenji Matsuda, Pham Mai Khanh, Dang Quoc Khanh, Le Van Lich
PublisherTrans Tech Publications Ltd
Pages218-222
Number of pages5
ISBN (Print)9783035714586
DOIs
StatePublished - 2020
Event13th International Conference on the Physical Properties and Application of Advanced Materials, ICPMAT 2018 - Hanoi, Viet Nam
Duration: 2018/09/042018/09/07

Publication series

NameMaterials Science Forum
Volume985 MSF
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Conference

Conference13th International Conference on the Physical Properties and Application of Advanced Materials, ICPMAT 2018
Country/TerritoryViet Nam
CityHanoi
Period2018/09/042018/09/07

Keywords

  • Lattice distortion
  • Reciprocal space maps
  • Thermal coefficients
  • Thin film

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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