Preparation of Al-O-N coatings by r.f. reactive sputtering

Masateru Nose*, Tokimasa Kawabata, Shouhei Ueda, Takekazu Nagae, Atsushi Saiki, Kenji Matsuda, Kiyoshi Terayama, Susumu Ikeno

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

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Keyphrases

Engineering

Material Science