Measurement technique for the evaluation of residual stress in epitaxial thin film by asymmetric X-ray diffraction

  • Hiroshi Uchida
  • , Takanori Kiguchi
  • , Atsushi Saiki
  • , Naoki Wakiya
  • , Nobuo Ishizawa
  • , Kazuo Shinozaki
  • , Nobuyasu Mizutani

Research output: Contribution to journal › Article › peer-review

14   Link opens in a new tab Scopus citations

Fingerprint

Dive into the research topics of 'Measurement technique for the evaluation of residual stress in epitaxial thin film by asymmetric X-ray diffraction'. Together they form a unique fingerprint.
Sort by

Keyphrases

Material Science

Engineering