Measurement technique for the evaluation of residual stress in epitaxial thin film by asymmetric X-ray diffraction

Keyphrases

• X Ray Diffraction 100%
• Residual Stress 100%
• Measurement Techniques 100%
• Epitaxial Thin Film 100%
• X-ray Diffraction Method 50%
• PbTiO3 Films 50%
• Analytical Techniques 25%
• Stress Value 25%
• Coefficient of Thermal Expansion 25%
• Measurement Results 25%
• Displacement Measurement 25%
• Epitaxial 25%
• SrTiO3 Substrate 25%
• Polycrystalline Films 25%
• Stress Determination 25%
• Polycrystalline Thin Films 25%
• Stress Measurement 25%
• Actual Application 25%

Material Science

• Film 100%
• X-Ray Diffraction 100%
• Residual Stress 100%
• Thin Films 100%
• Diffraction Measurement 50%
• Thermal Expansion 25%
• Analytical Method 25%
• Stress Measurement 25%

Engineering

• Residual Stress 100%
• Ray Diffraction 100%
• Thin Films 100%
• Polycrystalline 50%
• Ray Diffraction Technique 50%
• Good Agreement 25%
• Measured Value 25%
• Displacement Measurement 25%
• Expansion Coefficient 25%