Growth condition of CeO₂ thin films grown on glass substrate from aqueous solution and their optical property

Cerium dioxide (CeO2) thin film is an attractive material with multiple applications. In this study CeO2 precursor thin films were deposited onto glass substrates at a room temperature from an aqueous solution by applying constant electrical field and their optical properties were investigated. The precursor was an aqueous solution of Ce(NO3)3-6H2O, Y(NO3)3-6H2O, and NH3(aq). The thin film was deposited on the glass substrate of the minus electrode side. By applying the electrical field of 2.6-3.6 V, the Y-Ce(OH)3 thin film was effectively deposited on glass substrates for 20-60 min at room temperature. The as-deposited film was amorphous, and a crystalline phase of Y-CeO2 with a transparent and smooth surface can be obtained after annealing at 823 K for 5 h in air. Spectral transmission curves of visible to ultraviolet light region through Y-CeO2 films were measured and about 10 to 30 % absorption peaks were observed around 310 to 330 nm.