Fabrication of CeO2/Al multilayer thin films and the thermal behavior

Shumpei Kurokawa; Takashi Hashizume; Masateru Nose; Atsushi Saiki

doi:10.1002/9781118771327.ch4

Fabrication of CeO₂/Al multilayer thin films and the thermal behavior

Shumpei Kurokawa, Takashi Hashizume, Masateru Nose, Atsushi Saiki

Materials Design and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Abstract

Cerium dioxide (CeO₂) thin film is an attractive material with multiple applications, such as electrolytes in solid oxide fuel cells. In this study, CeO₂ and Al multilayer thin film were fabricated by using the differential pumping co-sputtering system which had multi-chamber and each layer was deposited in divided atmospheres and depositing condition independently. Their morphologies and the effect of annealing were investigated. As a result, as-deposited samples showed a peak of XRD at 2 θ = 38.5° corresponding to the (111) plane of Al. However annealed samples did not show the peaks of Al.

Original language	English
Title of host publication	Ceramics for Environmental and Energy Applications II - A Collection of Papers Presented at the 10th Pacific Rim Conference on Ceramic and Glass Technology, PacRim 2013
Publisher	wiley
Pages	33-41
Number of pages	9
ISBN (Electronic)	9781118771327
ISBN (Print)	9781118771242
DOIs	https://doi.org/10.1002/9781118771327.ch4
State	Published - 2014/03/03
Event	10th Pacific Rim Conference on Ceramic and Glass Technology, PacRim 2013 - Coronado, CA, United States Duration: 2013/06/02 → 2013/06/06

Publication series

Name	Ceramic Transactions
Volume	246
ISSN (Print)	1042-1122

Conference

Conference	10th Pacific Rim Conference on Ceramic and Glass Technology, PacRim 2013
Country/Territory	United States
City	Coronado, CA
Period	2013/06/02 → 2013/06/06

Keywords

Cerium dioxide
Co-sputtering system
Thin films
X-ray diffraction spectrometry
Yittria stabilized zirconia

ASJC Scopus subject areas

General Engineering
General Materials Science
General Energy
General Chemical Engineering

Access to Document

10.1002/9781118771327.ch4

Cite this

Kurokawa, S., Hashizume, T., Nose, M., & Saiki, A. (2014). Fabrication of CeO₂/Al multilayer thin films and the thermal behavior. In Ceramics for Environmental and Energy Applications II - A Collection of Papers Presented at the 10th Pacific Rim Conference on Ceramic and Glass Technology, PacRim 2013 (pp. 33-41). (Ceramic Transactions; Vol. 246). wiley. https://doi.org/10.1002/9781118771327.ch4

@inbook{14f3689d6f164de7bee8ddf4ccd8de78,

title = "Fabrication of CeO2/Al multilayer thin films and the thermal behavior",

abstract = "Cerium dioxide (CeO2) thin film is an attractive material with multiple applications, such as electrolytes in solid oxide fuel cells. In this study, CeO2 and Al multilayer thin film were fabricated by using the differential pumping co-sputtering system which had multi-chamber and each layer was deposited in divided atmospheres and depositing condition independently. Their morphologies and the effect of annealing were investigated. As a result, as-deposited samples showed a peak of XRD at 2 θ = 38.5° corresponding to the (111) plane of Al. However annealed samples did not show the peaks of Al.",

keywords = "Cerium dioxide, Co-sputtering system, Thin films, X-ray diffraction spectrometry, Yittria stabilized zirconia",

author = "Shumpei Kurokawa and Takashi Hashizume and Masateru Nose and Atsushi Saiki",

note = "Publisher Copyright: {\textcopyright} 2014 The American Ceramic Society. Published 2014 by John Wiley & Sons, Inc.; 10th Pacific Rim Conference on Ceramic and Glass Technology, PacRim 2013 ; Conference date: 02-06-2013 Through 06-06-2013",

year = "2014",

month = mar,

day = "3",

doi = "10.1002/9781118771327.ch4",

language = "英語",

isbn = "9781118771242",

series = "Ceramic Transactions",

publisher = "wiley",

pages = "33--41",

booktitle = "Ceramics for Environmental and Energy Applications II - A Collection of Papers Presented at the 10th Pacific Rim Conference on Ceramic and Glass Technology, PacRim 2013",

}

Kurokawa, S, Hashizume, T, Nose, M & Saiki, A 2014, Fabrication of CeO₂/Al multilayer thin films and the thermal behavior. in Ceramics for Environmental and Energy Applications II - A Collection of Papers Presented at the 10th Pacific Rim Conference on Ceramic and Glass Technology, PacRim 2013. Ceramic Transactions, vol. 246, wiley, pp. 33-41, 10th Pacific Rim Conference on Ceramic and Glass Technology, PacRim 2013, Coronado, CA, United States, 2013/06/02. https://doi.org/10.1002/9781118771327.ch4

Fabrication of CeO₂/Al multilayer thin films and the thermal behavior. / Kurokawa, Shumpei; Hashizume, Takashi; Nose, Masateru et al.
Ceramics for Environmental and Energy Applications II - A Collection of Papers Presented at the 10th Pacific Rim Conference on Ceramic and Glass Technology, PacRim 2013. wiley, 2014. p. 33-41 (Ceramic Transactions; Vol. 246).

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

TY - CHAP

T1 - Fabrication of CeO2/Al multilayer thin films and the thermal behavior

AU - Kurokawa, Shumpei

AU - Hashizume, Takashi

AU - Nose, Masateru

AU - Saiki, Atsushi

PY - 2014/3/3

Y1 - 2014/3/3

N2 - Cerium dioxide (CeO2) thin film is an attractive material with multiple applications, such as electrolytes in solid oxide fuel cells. In this study, CeO2 and Al multilayer thin film were fabricated by using the differential pumping co-sputtering system which had multi-chamber and each layer was deposited in divided atmospheres and depositing condition independently. Their morphologies and the effect of annealing were investigated. As a result, as-deposited samples showed a peak of XRD at 2 θ = 38.5° corresponding to the (111) plane of Al. However annealed samples did not show the peaks of Al.

AB - Cerium dioxide (CeO2) thin film is an attractive material with multiple applications, such as electrolytes in solid oxide fuel cells. In this study, CeO2 and Al multilayer thin film were fabricated by using the differential pumping co-sputtering system which had multi-chamber and each layer was deposited in divided atmospheres and depositing condition independently. Their morphologies and the effect of annealing were investigated. As a result, as-deposited samples showed a peak of XRD at 2 θ = 38.5° corresponding to the (111) plane of Al. However annealed samples did not show the peaks of Al.

KW - Cerium dioxide

KW - Co-sputtering system

KW - Thin films

KW - X-ray diffraction spectrometry

KW - Yittria stabilized zirconia

UR - http://www.scopus.com/inward/record.url?scp=84897933064&partnerID=8YFLogxK

U2 - 10.1002/9781118771327.ch4

DO - 10.1002/9781118771327.ch4

M3 - 章

AN - SCOPUS:85104448821

SN - 9781118771242

T3 - Ceramic Transactions

SP - 33

EP - 41

BT - Ceramics for Environmental and Energy Applications II - A Collection of Papers Presented at the 10th Pacific Rim Conference on Ceramic and Glass Technology, PacRim 2013

PB - wiley

T2 - 10th Pacific Rim Conference on Ceramic and Glass Technology, PacRim 2013

Y2 - 2 June 2013 through 6 June 2013

ER -