Effects of deposition temperature on structural defect and electrical resistivity in heteroepitaxial La0.5Sr0.5CoO3/CeO2/YSZ/Si films

Chun Hua Chen; Atsushi Saiki; Naoki Wakiya; Kazuo Shinozaki; Nobuyasu Mizutani

doi:10.1116/1.1502695

Effects of deposition temperature on structural defect and electrical resistivity in heteroepitaxial La_0.5Sr_0.5CoO₃/CeO₂/YSZ/Si films

Chun Hua Chen, Atsushi Saiki, Naoki Wakiya, Kazuo Shinozaki, Nobuyasu Mizutani

Materials Design and Engineering

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

The effects of deposition temperature on structural defect and electrical resistivity in heteroepitaxial La_0.5Sr_0.5CoO₃(LSCO)/CeO₂/YSZ/Si films were discussed. It was found that a high correlation existed between the electrical resistivity of LSCO and the defect type and concentration. The analysis showed that the distribution of electrical resistivity exihibited a mosaic dispersion degree dependence in 500-600 °C.

Original language	English
Pages (from-to)	1749-1754
Number of pages	6
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	20
Issue number	5
DOIs	https://doi.org/10.1116/1.1502695
State	Published - 2002

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1116/1.1502695

Cite this

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abstract = "The effects of deposition temperature on structural defect and electrical resistivity in heteroepitaxial La0.5Sr0.5CoO3(LSCO)/CeO2/YSZ/Si films were discussed. It was found that a high correlation existed between the electrical resistivity of LSCO and the defect type and concentration. The analysis showed that the distribution of electrical resistivity exihibited a mosaic dispersion degree dependence in 500-600 °C.",

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AU - Chen, Chun Hua

AU - Saiki, Atsushi

AU - Wakiya, Naoki

AU - Shinozaki, Kazuo

AU - Mizutani, Nobuyasu

PY - 2002

Y1 - 2002

N2 - The effects of deposition temperature on structural defect and electrical resistivity in heteroepitaxial La0.5Sr0.5CoO3(LSCO)/CeO2/YSZ/Si films were discussed. It was found that a high correlation existed between the electrical resistivity of LSCO and the defect type and concentration. The analysis showed that the distribution of electrical resistivity exihibited a mosaic dispersion degree dependence in 500-600 °C.

AB - The effects of deposition temperature on structural defect and electrical resistivity in heteroepitaxial La0.5Sr0.5CoO3(LSCO)/CeO2/YSZ/Si films were discussed. It was found that a high correlation existed between the electrical resistivity of LSCO and the defect type and concentration. The analysis showed that the distribution of electrical resistivity exihibited a mosaic dispersion degree dependence in 500-600 °C.

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M3 - 学術論文

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