Keyphrases
Sputtering System
100%
Co-sputtering
100%
Differential Pump
100%
Nanocomposite Film
100%
Novel Nanocomposites
100%
Two-chamber
66%
Gas Flow
66%
Potential Difference
66%
Conductance
66%
Process Gases
66%
Spectroscope
66%
Cross-contamination
66%
Orifice
66%
Glow Discharge Plasma
66%
Optical Emission
66%
Gas Monitor
66%
System Development
33%
Oxygen Partial Pressure
33%
Co-deposits
33%
SiOx
33%
Multi-chamber
33%
Thermodynamic Constraints
33%
Knudsen number
33%
Flow Parameters
33%
System Features
33%
Pumping System
33%
Molecular Flow
33%
Substrate Holder
33%
Multifunctional Nanocomposite Film
33%
Left Chamber
33%
Flow Indicators
33%
Oxygen Contamination
33%
Rapid Rotation
33%
Engineering
Nanocomposite
100%
Glow Discharge
66%
Potential Difference
66%
Process Gas
66%
Orifice
66%
Gas Flow
66%
Light Emission
66%
Oxygen Partial Pressure
33%
Knudsen Number
33%
Molecular Flow
33%
Pumping System
33%
Phase Composition
33%
Material Science
Nanocomposite Film
100%
Gas Flow
66%
Orifice
66%
Aluminum Nitride
33%
Phase Composition
33%