Creation of next-generation nanocomposite films by establishment of differential pumping co-deposition technique

Search results

• 2012

  Deposition of CeO_2/Al thin films by differential pumping co-sputtering system

  Saiki, A., Kurokawa, S., Hashidume, T. & Terayama, K., 2012.

  Research output: Contribution to conference › Presentation

• Deposition of novel nanocomposite films by a newly developed differential pumping co-sputtering system

  Nose, M., Kurimoto, T., Saiki, A., Matsuda, K. & Terayama, K., 2012/01, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 30, 1, 011502.

  Research output: Contribution to journal › Article › peer-review

  • Sputtering System 100%
  • Co-sputtering 100%
  • Differential Pump 100%
  • Nanocomposite Film 100%
  • Novel Nanocomposites 100%

  10   Link opens in a new tab Scopus citations

• Oxidation resistance and self hardening of CrAlN/BN nanocomposite coatings

  Nose, M., Watanuki, T., Kawabata, T., Hatano, Y., Matsuda, K. & Ikeno, S., 2012, THERMEC 2011. Trans Tech Publications Ltd, p. 2559-2564 6 p. (Materials Science Forum; vol. 706-709).

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

  • Oxidation Resistance 100%
  • Annealing 100%
  • AlCrN 100%
  • Nanocomposite Coating 100%
  • Self-hardening 100%

  1   Link opens in a new tab Scopus citations

• 差動排気型2元同時成膜装置により作製したCrAlN/SiOxナノコンポジット膜の微細構造

  高畠浩史, 野瀬正照, 松田健二 & 他3名, 2012.

  Research output: Contribution to conference › Presentation

• 差動排気型2元同時成膜装置を用いたAlN/SiOxナノコンポジット膜の作製

  佐藤誉将, 野瀬正照, 松田健二 & 他3名, 2012.

  Research output: Contribution to conference › Presentation

• 2011

  CrAlN/BNナノコンポジット膜の大気中熱処理による自己硬化特性

  野瀬正照, 松田健二 & 他4名, 2011.

  Research output: Contribution to conference › Presentation

• EM Charcterization of Self Hardening CrAlN/BN nanocomposite Coatings

  M.Nose, W-A.Chiou, L-C.Lai, T.Watanuki & K.Matsuda, 2011.

  Research output: Contribution to conference › Presentation

• Mechanical properties and oxidation resistance of CrAlN/BN nanocomposite coatings prepared b reactive d.c.and r.f.co-sputtering

  M.Nose, K.Matsuda, S.Ikeno & 他3名, 2011, In: Surface and Coatings Technology. 49

  Research output: Contribution to journal › Article › peer-review

• Mechanical proper-ties and oxidation resistance of CrAlN/BN nanocomposite coatings prepared by reactive d. c. and r. f. co-sputtering

  Nose, M., Watanuki, T., Ueda. K. Fujii, S., Matsuda, K. & Ikeno, S., 2011, In: Surface and Coatings Technology. 205

  Research output: Contribution to journal › Article › peer-review

• Mechanical properties and oxidation resistance of CrAlN/BN nanocomposite coatings prepared by reactive dc and rf cosputtering

  Nose, M., Kawabata, T., Watanuki, T., Ueda, S., Fujii, K., Matsuda, K. & Ikeno, S., 2011/07/25, In: Surface and Coatings Technology. 205, SUPPL. 2, p. S33-S37

  Research output: Contribution to journal › Article › peer-review

  • Mechanical Properties 100%
  • Oxidation Resistance 100%
  • Co-sputtering 100%
  • AlCrN 100%
  • Nanocomposite Coating 100%

  38   Link opens in a new tab Scopus citations

• OXIDATION RESITANCE AND SELF HARDENING OF CR-AL-N/BN NANOCOMPOSITE COATINGS

  M.Nose, W-A.Chiou, L-C.Lai, T.Watanuki & K.Matsuda, 2011.

  Research output: Contribution to conference › Presentation

• Preperation of new nitride/oxide nanocomposite coatings by a newly developed differential pumping co-sputtering system

  Nose, M., Kawabata, T., Matsuda, K. & Chiou, W.-A., 2011.

  Research output: Contribution to conference › Presentation

• RFスパッタリングを用いたCeO_2-Al薄膜の作製

  黒河駿平, 橋爪隆 & 佐伯淳, 2011.

  Research output: Contribution to conference › Presentation

• Self hardening effect of CrAlN/BN nanocomposite films deposited by reactive dc and rf cosputtering

  Nose, M., Chiou, W.-A., Kawabata, T., Hatano, Y. & Matsuda, K., 2011.

  Research output: Contribution to conference › Presentation

• 差動排気型2元同時スパッタ装置の開発

  野瀬正照, 佐伯淳, 池野進, 寺山清志, 松田健二 & 他4名, 2011.

  Research output: Contribution to conference › Presentation

• 差動排気型2元同時成膜法による窒化物/酸化物系ナノコンポジット膜の作製

  高畠浩史, 野瀬正照, 松田健二 & 他4名, 2011.

  Research output: Contribution to conference › Presentation

• 差動排気型2元同時成膜法による窒化物/酸化物系ナノコンポジット膜の機械的性質

  高畠浩史, 野瀬正照, 松田健二 & 他4名, 2011.

  Research output: Contribution to conference › Presentation

• 差動排気型2元同時成膜装置により作製したCrAlN/酸化物ナノコンポジット膜の微細構造

  高畠浩史, 野瀬正照, 松田健二 & 他4名, 2011.

  Research output: Contribution to conference › Presentation

• 差動排気型2元同時成膜装置を用いた窒化物/酸化物ナノコンポジット膜作製

  佐藤誉将, 野瀬正照, 松田健二 & 他4名, 2011.

  Research output: Contribution to conference › Presentation

• 差動排気型二元同時成膜装置により作製したCrAlN酸化物ナノコンポジット複合膜の機械的性質

  高畠浩史, 野瀬正照, 松田健二 & 他1名, 2011.

  Research output: Contribution to conference › Presentation

• 複合膜の成膜装置及び成膜方法

  野瀬正照 (Inventor), 栗本猛 (Inventor), 池野進 (Inventor), 寺山清志 (Inventor) & 佐伯淳 (Inventor), 2011

  Research output: Industrial property › Patent

• 2010

  CrAlN/BNナノコンポジット膜の構造と機械的性質に及ぼす熱処理の効果

  野瀬正照, 松田健二, 池野進 & 他3名, 2010.

  Research output: Contribution to conference › Presentation

• CrAlN/BNナノコンポジット膜の熱処理による構造変化

  野瀬正照, 松田健二, 池野進 & 他3名, 2010.

  Research output: Contribution to conference › Presentation

• Growth Condition of CeO_2 Thin Films Grown on Glass Substrate from Aqueous Solution and Their Optical Property

  A.Saiki, K.Terayama & 他2名, 2010.

  Research output: Contribution to conference › Presentation

• Mechanical properties and oxidation resistance of CrAlN/BN nanocomposite coatings prepared by reactive d.c.and r.f.co-sputtering

  M.Nose, K.Matsuda, S.Ikeno & 他3名, 2010.

  Research output: Contribution to conference › Presentation

• Mechanical properties and oxidation resistance of CrAlN/BN nanocomposite coatings prepared by reactive d. c. and r. f. co-sputtering

  Nose, M., Matsuda, K., Ikeno, S. & al., E., 2010.

  Research output: Contribution to conference › Presentation

• Microstructure and mechanical properties of Cr-Al-B-N coatings prepared by reactive D.C. and R.F. Co-sputtering

  Nose, M., Kawabata, T., Ueda, S., Fujii, K., Matsuda, K. & Ikeno, S., 2010, THERMEC 2009. Chandra, T., Chandra, T., Chandra, T., Wanderka, N., Wanderka, N., Wanderka, N., Reimers, W., Reimers, W., Reimers, W., Ionescu, M., Ionescu, M. & Ionescu, M. (eds.). Trans Tech Publications Ltd, p. 781-786 6 p. (Materials Science Forum; vol. 638-642).

  Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

  • Mechanical Properties 100%
  • Microstructure Properties 100%
  • AlCrN 100%
  • RF Co-sputtering 100%
  • X-Ray Diffraction 100%

  5   Link opens in a new tab Scopus citations

• RFバイアススパッタ法により作製したAl-O-N膜の構造と特性

  野瀬正照, 佐伯淳, 松田健二, 寺山清志, 池野進 & 他3名, 2010.

  Research output: Contribution to conference › Presentation

• 加工工具用硬質保護膜

  野瀬正照 (Inventor), 池野進 (Inventor) & 松田健二 (Inventor), 2010

  Research output: Industrial property › Patent

• 反応性2元同時スパッタ法で作製したCrAlN/BNナノコンポジット膜の機械的性質におよぼす熱処理の効果

  野瀬正照, 松田健二, 池野進 & 他3名, 2010.

  Research output: Contribution to conference › Presentation

• 大気中熱処理したCrAlN/BNナノコンポジット膜の機械的性質と微細構造

  野瀬正照, 松田健二, 池野進 & 他3名, 2010.

  Research output: Contribution to conference › Presentation

• 差動排気型2元同時スパッタ装置の動作特性

  野瀬正照, 佐伯淳, 池野進, 寺山清志, 松田健二 & 他4名, 2010.

  Research output: Contribution to conference › Presentation

• 差動排気型2元同時スパッタ装置の開発

  野瀬正照, 佐伯淳, 池野進, 寺山清志, 松田健二 & 他4名, 2010.

  Research output: Contribution to conference › Presentation

• 複合膜の成膜装置及び成膜方法

  野瀬正照 (Inventor), 栗本猛 (Inventor), 池野進 (Inventor), 寺山清志 (Inventor) & 佐伯淳 (Inventor), 2010

  Research output: Industrial property › Patent

• 2009

  Al-O-N膜の構造と特性に及ぼすスパッタ条件の影響

  野瀬正照, 佐伯淳, 松田健二, 寺山清志, 池野進 & 他3名, 2009.

  Research output: Contribution to conference › Presentation

• DC-RF2元同時反応スパッタ法で作製したCrAlN/BN複合膜の耐酸化性

  野瀬正照, 松田健二, 池野進 & 他3名, 2009.

  Research output: Contribution to conference › Presentation

• RFバイアススパッタ法により作製したAl-O-N膜の構造と機械的性質

  野瀬正照, 佐伯淳, 松田健二, 寺山清志, 池野進 & 他3名, 2009.

  Research output: Contribution to conference › Presentation

• 反応性2元同時スパッタ法で作製したCrAlN/BNコーティング膜の構造と機械的性質

  野瀬正照, 松田健二, 池野進 & 他3名, 2009.

  Research output: Contribution to conference › Presentation

• 硬質保護膜およびその製造方法

  野瀬正照 (Inventor), 池野進 (Inventor), 寺山清志 (Inventor), 佐伯淳 (Inventor), 松田健二 (Inventor), 橋爪隆 (Inventor) & 川畑常眞 (Inventor), 2009

  Research output: Industrial property › Patent