Project Details
Description
A differential pumping co-sputtering system(DPCS) was newly developed to facilitate a controlled, but flexible fabrication of multifunctional nanocomposite films with compositions not limited by thermodynamic restrictions. As for the hard coatings, new nanocomoposite films consisting of nitride(CrAlN or AlN) and oxide(Al_2O_3 and SiO_2) were prepared using DPCS. Furthermore, a new nanocomposite films consisting of CrAlN and alumina was obtained from CrAlN/BN films, which was prepared with conventional sputtering apparatus, by annealing in air. On the other hand, as for the functional film, multi layered CeO_2/Al films were successfully obtained without aluminum oxidation during sputtering deposition with DPCS
Status | Finished |
---|---|
Effective start/end date | 2009/04/01 → 2012/03/31 |
Fingerprint
Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.